AlB12纳米/亚微米球形材料的制备与表征

Synthesis and Characterization of AlB12 Nano/submicron Spherical Materials

摘要: 以金属铝(Al)粉末和三氯化硼(BCl3)分别作为铝源和硼源前驱体,在无催化剂的情况下,利用简单的一步化学气相沉积方法在Si衬底上(蒸发位)制备了AlB12纳米/亚微米球形材料.利用扫描电镜和透射电镜表征了AlB12微结构材料的形貌、成分和结构.结果表明:所合成的材料均为球形的纳米/亚微米球材料,直径范围约0.2～2.5μm;从直径分布统计直方图可知平均直径约0.97μm.高分辨透射电镜(HRTEM)分析发现,材料中没有规则的干涉条纹出现,为典型的非晶结构;选区电子衍射(SAED)表明,材料无规则衍射斑点,为典型的非晶结构相,与HRTEM分析结果一致;能谱结果表明,Al和B的原子百分比为11.9,与A1B12的化学计量比符合很好.850℃高温状态下,AlB12纳米/亚微米颗粒的直径随着反应时间的增加而增大

Abstract: AlB12 nano/ submicron spherical materials on silicon substrates(evaporation deposition) was synthesized by one-step chemical vapor deposition(CVD) method with catalyst free using aluminium(Al) powders and BCl3 as precursors.The morphology,component and crystal structure of the AlB12 were examined by scanning electron microscopy(SEM) and transmission electron microscopy(TEM).The SEM images show that the diameter of the as prepared nano/submicron spherical materials is in the range of 0.2~2.5 μm a...