Abstract: ZnO is a novel material for wide band gap semiconductor, with good thermal and chemical stability and radiation resistance,and could be a good candidate for piezoelectric, photoelectric, and surface acoustic wave devices. In this paper, the properties of ZnO thin films and synthesize methods, such as thermal spray, pulsed laser deposition, and metal-organic chemical vapor deposition, are introduced. The progress in ultraviolet stimulated emission and p-type doping of ZnO are also discussed.