Abstract: Using data envelopment analysis method, taking the industrial development data of Henan province and cities from 2011 to 2017 as samples, the efficiency of industrial green development in Henan province with DEA-SBM is measured model based on unexpected output, its spatiotemporal evolution law is analyzed, and a multiple linear regression model is constructed to analyze its influencing factors. The results showed that: during the study period, the industrial green development efficiency of Henan province was on the rise as a whole, and there were obvious differences in the time series variation of industrial green development efficiency, which could be divided into three types: stable type, sustained growth type and unstable type. Zhengzhou, Xuchang, Luohe and Kaifeng belonged to sustainable growth type, and Zhoukou, Sanmenxia and Puyang belonged to unstable type, and the remaining 11 cities were stable type. The efficiency of industrial green development in Henan province was high in the middle and low in the South and North. The sustainable growth and unstable cities with higher overall level were mainly distributed in the central and eastern regions of Henan province and Sanmenxia in the West. Most of the stable cities with lower overall level were distributed in the north and south of Henan province. The level of economic development and industrial structure had obvious positive driving forces on the green development of industry in Henan province. However, the level of urbanization and energy consumption were negatively correlated with the efficiency of industrial green development in Henan province.