Abstract: For contour defect tracking error compensation algorithm, the control algorithms such as cross coupling control algorithm, local coordinate algorithm, the global tasks coordinate algorithm etc. were studied, the detailed theoretical calculation and derivation were done.  The in-depth analysis and discussion of the two compensation algorithms in the application of cross coupling control field were given by using two-axis device as a carrier. Based on Matlab/Simulink computer simulation, the results showed that under the condition of low-speed circular trajectory tracking, the local tasks coordinate algorithm worked well, while under a high-speed circular trajectory tracking, the global tasks coordinate algorithm had a significant advantage over the local coordinate algorithm.